A Methodology for Predictive Maintenance in Semiconductor Manufacturing. Austrian Journal of Statistics, [S. l.], v. 41, n. 3, p. 161–173, 2016. DOI: 10.17713/ajs.v41i3.171. Disponível em: https://www.ajs.or.at/index.php/ajs/article/view/vol41%2C%20no3%20-%201. Acesso em: 17 apr. 2026.